
MEMS and NanotechnologyMicroelectromechanical systems (MEMS) and nanotechnology are revolutionary enabling technologies (ET). These technologies merge the functions of sensing, actuation, and controls with computation and communication to affect the way people and machines interact with the physical world. This is done by integrating advances in various multidisciplinary fields to produce very small devices that use very low power and operate in many different environments. Today, developments in MEMS and nanotechnology are being made at an unprecedented rate, driven by both technology and user requirements. These developments depend on micromechanical and nanomechanical analyses, and characterization of structures comprising nanophase materials.The objective of the MEMS and Nanotechnology TD is to provide a forum for an up-to-date account of the advances in the field of MEMS and nanotechnology and to promote an alliance of governmental, industrial, and academic practitioners of ET.
MEMS and Nanotechnology Technical Division-Updated May 2012 Year 2011/2012 activities for the MEMS and Nanotechnology Technical Division of the SEM
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